FS610
FS610-2/C
DLHZO-TEZ, DLKZOR-TEZ
1
(1) (2)
DLHZO
/--
-
40 =
60 =
0
40
L
7 3
* * *
- -
TEZ
NPSN
1 = 3 =
0 = 06
1 = 10
SN
SF
SL
L
T
V =
D
P-A = Q, B-T = Q/2
P-B = Q/2, A-T = Q
DT
P-A = Q, B-T = Q/2
P-B = Q/2, A-T = Q
TEZ
DLHZO
DLKZOR
- =
NBR
PE = FKM
BT
/
0(L) 1(L) 1(V) 3(L) 3(T) 3(V) 5(L,T) 7
(L,T,V,D,DT)
DLHZO = 4 7 8 14 - 20 28 40
DLKZOR = - - - 60 60 - - 100
NP
BC = CANopen EW = POWERLINK
BP = PROFIBUS DP EI = EtherNet/IP
EH = EtherCAT EP = PROFINET RT/IRT
-
D
B
Y
C
I
U
K
SSI
2
3
Ü
8
DLHZO: DLKZOR
:
06-ISO 4401 10-ISO 4401
70 l/min 130 l/min
350 bar 315 bar
= 06
= 10
A
D(SSI,)
=
(2)
(1)
USB
13
=
= =
12
= NBR
=
=
±10V
DC
±10V
DC
Ü
=
=
- 14
601
∆
p = 70bar P-T l/min
17
DLHZO-TEZ-D-SF-EH-040
2
M
(c)
M
(f)
(e)
(d)
(a)
(b)
FS610
3
t
t
SF SL
T
M
P
P
A B
P T
T
M
L
A B
P T
T
M
P
L
5
Z-SW-FULL : NP (USB) PS (Serial)
BC (CANopen) BP (PROFIBUS DP) EH (EtherCAT)
EW (POWERLINK) EI (EtherNet/IP) EP (PROFINET)
4
/
() –
–
(Pa-Pb)
SF -
SL -
-
- Atos
CE/ EMC
Atos Z-SWZ-SWUSB
Z-SWSF,SL
USB
E-C-SB-USB/M12
E-A-SB-USB/OPT
E-C-SB-M12/BTH
E-A-SB-USB/BTH
8
7
9
10
(1)
(2)
(3)
(4)
DLHZO DLKZOR
[bar]
P, A, B = 350;
T Y = 10
P, A, B = 315;
T Y = 10
L0 L1 V1 L3 V3 L5 T5 L7 T7 V7 D7 DT7 L3 T3 L7 T7 V7 D7 DT7
2.5 4.5 8 9 13 18 26
26~13 (4)
40 60
60~33 (4)
4 7 12 14 20 28 40
40~20 (4)
60 100
100~50 (4)
8 14 16 30 40 50 70
70~40 (4)
110 130
130~65 (4)
(2) [cm
3
/min]
<100 <200 <100 <300 <150 <500 <200 <900 <200 <200 <700 <200
<1000
<400
<1500
<400 <400
<1200
<400
(3) [ms]
≤ 10 ≤ 15
±
∆p= 30 bar
∆p= 70 bar
∆p P-T [l/min]
(1)
6
26
13
-
-
-
-
Ü
- 50°CISO VG46
= 210
= 210
0.1 [%]
0.1 [%]
∆T = 40°C 1%
∆p13.2
50
0~100%
12
NBR, FKM, NBR
HL, HLP, HLPD, HVLP, HVLPD
DIN 51524
FKM
HFDU, HFDR
ISO 12922
NBR, NBR
HFC
11
50 W
DLHZO = 2.6 A DLKZOR = 3 A
DLHZO = 3 ~ 3.3
Ω
DLKZOR = 3.8 ~ 4.1 Ω
+24 V
DC
±10 VDC
+24V
DC
@ max 100 mA
USB
CANopen
EN50325-4 + DS408
PROFIBUS DP
EN50170-2/IEC61158
EtherCAT, POWERLINK,
EtherNet/IP, PROFINET IO RT / IRT
EC 61158
USB 2.0 + USB OTG CAN ISO11898 RS485 100 Base TX
FS610
20
DIN EN60529
EMC
+24V
DC
V RMS = 20 ~ 32 V (10 %V PP)
±10V
DC (24 VMAX Ri50kΩ
±20mA Ri=500Ω
10V
DC @max 5mA
20mA @max 500Ω
0~5V
DC 9~24V DC 5~9V DC Ri10kΩ
0~24V
DC [] V@ max 50 mA
@ max 100 mA +5V DC @ max 100 mA
@ max 14 mA
E-ATR-8 GS465
H180°C
ISO 13732-1EN982
ED=100%
PCB
2014/30/UEEN 61000-6-2EN 61000-6-3
Atos ASCII
22
24V DC800ms(0
NBR = -20~+60HFC= -20~+50
FKM/PE = -20~+80
NBR/BT= -40~+60HFC= -40~+50
20~100mm²/s-15~380mm²/s
13
21
3
4
0 ~ +10 V
P
A / B T
12 ~ 20 mA
0 ~ -10 V
P
B / A T
12 ~ 4 mA
0 ~ +10 V
P
B / A T
12 ~ 20 mA
0 ~ -10 V
P
A / B T
12 ~ 4 mA
5
6
}
}
}
}
DLHZO:
1 =
L7, T7, V7, D7, DT7
2 =
L5, T5
3 =
V3
4 =
L3
5 =
L1, V1
6 =
L0
DLKZOR:
7 =
L7, T7, V7, D7, DT7
8 =
L3T3
1
2
3
4
5
6
80
50
30
10
5
3
2
10 30 70 100 200 300
50°CISO VG46
13.1
1 = L
2 = -D7
3 = DT7
4 = T5DLHZO
5 = T3
6 = V
T3 T5 T7
T5 0~60% T3 T7
0~40%
DT7T7
1:2
13.2
100%
[V]
[V]
[V] [V]
[V] [V]
[%]
[%]
[%][%]
[%]
[%]
[l/min]
[l/min]
∆p[bar]
∆p[bar]
7
8
300
200
100
50
30
10
10 30 70 100 200 300
13.3
∆p A
B [%P]
∆p A B
FS610
1
2
12
DLHZO DLKZOR
0 -100
0 -75
0 -50
0 -25
100
75
50
25
0
100
75
50
25
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
0 -100
0 -75
0 -50
0 -25
4
4
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
5
10 15 20 25 0 5
10 15 20 25
0 6
12 18 24 30 0 6
12 18 24 30
1
1
1
1
2
3
1111 2 3
1
1
1
1
2
3
1111 2 3
3
3
10 50
100 200
10 50
100 200
4
4
12
12
3
3
10 50
100 200
10 50
100 200
1 2 3
± 5%
1
2
3
± 100%
4
5
6
± 5%
1
2
3
± 100%
4
5
6
56
56
56
56
[%]
13.4
[%] [%]
[ms] [ms]
13.5 DLHZO
13.6 DLKZOR
[dB][dB]
[dB][dB]
[]
[]
[]
[]
[Hz] [Hz]
[Hz] [Hz]
14
3
1
t = 7-10 ms (DLHZO)
t = 15-20 ms (DLKZOR)
t = 7-10 ms (DLHZO)
t = 15-20 ms (DLKZOR)
DLHZO
DLKZOR
P
A P B A T B T
50 70 70 50
50 70 - -
- - 15~30 10~20
- - 40~60 25~40
(1) (2)
[cm
3
/min]
(1)
(2)
17
16
15
I =
C =
D-SN:
/BI, /BIY, /BY, /IY
D-SN:
/BIU, /BIUY, /BU, /BUY, /IU, /IUY, /UY
/BIK, /BIKY, /BK, /BKY, /IK, /IKY, /KY
A-SN, A-SF, A-SL D-SF, D-SL:
/BC, /BCI, /BCIY, /BCY, /BI, /BIY, /BY,
/CI, /CIY, /CY,
/IY
A-SN, A-SF, A-SL
D-SF, D-SL:
/BCU, /BCIU, /BCIUY, /BCUY, /BIU, /BIUY, /BU, /BUY,
/CU, /CIU, /CIUY, /CUY, /IU, /IUY, /UY
/BCK, /BCIK, /BCIKY, /BCKY, /BIK, /BIKY, /BK, /BKY,
/CK, /CIK, /CIKY, /CKY, /IK, /IKY, /KY
B
Y
t = 0100bar
P = 100 bar
[l/min]
1
3
3
50 ∆p = 35bar
A
T210bar
4~20mA±10V DC
±10V±20mA
/I
/C±10V
DC
±10V
DC±20mA
18.3
18.5
18.10
18
FS610
/
ISO 4413
18.1 V+V0
10000µ F/40V4700µ F/40V
: 2.5 A
18.2 VL+VL0
10000µ F/40V4700µ F/40V
12910USB
500mA
(P_+)
P_+(4)2
(2.1)
±10V
DC/I 4~20mA
±10V±20mA
(2.1)0~24V
DC
18.4
F_INPUT+(7)3
SF, SL
±10V
DC/I 4~20mA
±10V±20mA
SN/0~24V
DC
(P_)
(
)
±10V
DC/I 4~20mA
±10V±20mA
18.6 F_
SN
()
±10V
DC±20mA
±10V
DC/I 4~20mA
±10V±20mA
18.7
324V
DC
-
- ()
- ()
18.8
( / ) 0V
DC
24V
DC
18.9
SSI(D )(A )
SSI/SSI
±10V
DC/C 4~20mA
±10V±20mA
(19.1)
±10V
DC/C 4~20mA
±10V±20mA
/(19.2)
19
LS ,FSDA
SSI (3)
±10 V
DC +24 VDC +5 VDC / +24 VDC +5 VDC / +24 VDC +24 VDC
±10V 0 ~ 10V 4 ~ 20 mA TTL 5Vpp - 150 KHz ±10 VDC 4 ~ 20 mA
-s/m 2s/m 2s/m 1s/m 550
< 0.4 % FS < 0.2 % FS
1 µm 1 µm (@ 0.15 m/s)
< 0.4 % FS
± 0.1% FS < ±0.03% FS < ± 0.01 % FS < ± 0.001 % FS < ±0.25% FS
± 0.05% FS < ± 0.005% FS < ± 0.001 % FS < ± 0.001 % FS < ±0.1% FS
(1) (2) (3)
20
1 V+
2 V0
3
4
5
6
7
8
9 VL+
10
VL0 (1)
11
PE
(1)
(1) (2)
19.1
19.2
(A ) SSI
(D)
/ 3
/ /
/(GS465)
/
/115%~120%
19.3
(1)
(2)
(2)
SSI
20.1 -12
P_
-
P_
F_+
F_
24V
DC
0V DC
24V DC0V DCVL0
±10V
DC/±20mA
±10V
DC/±20mA
±10V
DC/±20mA
±10V
DC/±20mA
24V
DC
0V DC
0V DC24V DCVL0
1
TX+
2
RX+
3
TX-
4
RX-
1
CAN_SHLD
2
3
CAN_GND
4
CAN_H
5
CAN_L
1
+5V_USB
2
ID
3
GND_USB
4
D-
5
D+
1
+5V
2
LINE-A
3
DGND
4
LINE-B
5
20.2
-
USB-M12-5
BC-M12-5
BP-M12-5 EH,EW,EI,EP-M12-4
0
-
+
-
0
0
2CAN+5V
1
CLOCK+ /R
/
2
CLOCK- /R
3
DATA+ /A
/
4
DATA- /A
5
NC /B
/
6
NC /B
7
VP VP
8
0 V 0 V
E1
1
VP +24V
/
2
VP +10V
/
3
AGND
4
TR
5
VP -10V
/
E2
(1)
20.3
/- M12-5 SF, SL
(1)
1 VF +24V
2 TR1
3 AGND
/ /
4 TR2
/ /
5 NC
/ / / /
ZH-5PM-2/2
1
VF+ 24V
1
V+
1
V+
2
TR1
4
TR
3
TR
3
AGND
3
V0
4
NC
1
VF+ 24V
1
V+
1
V+
4
TR2
4
TR
3
TR
3
AGND
3
V0
4
NC
ZBE-08
1
2
3
4
1
4
2
3
5
ZBE-08
TEZ
E1
ZH-8PM/5
SSITEZ
E1
ZH-8PM/5
1
/R
Red
R+
2
/R
Black
R-
3
/A
Brown
A+
4
/A
Green
A-
5
/B
Gray
B+
6
/B
Pink
B-
7
VP
Brown / Green
Up
8
0V
White / Green
0V
1
CLOCK+
3
Clock (+)
2
CLOCK-
4
Clock (-)
3
DATA+
2
Data (+)
4
DATA-
1
Data (-)
5
NC
-
NC
6
NC
-
NC
7
VP
5
+24 Vdc (-15/+20%)
8
0V
6
DC ground (for supply)
FS610
SL 1 1
24V
DC
20.4
(1)
(+)
(-)
(+)
(-)
+24V
DC,+5VDC()
R
+24V
DC,+5VDC()
SSI-18.9
20.5
+24V
DC()
+10V
DC()
-10V
DC()
18.9
20.6 TEZ
A2
A4
A
Ø 28Ø 29
~ 93
~ 100
PG13.5
PG16
D1 D2
B
Ø 15
~ 50
~ 50
Ø 15
20
~ 50
Ø 15
E1
E2
~ 50
Ø 15
~ 50
Ø 15
E1
E2
D1
D
2
E-C-SB-USB/M12
(2)
(2)
(2)
USB
ZH-5PM-2/2
ZH-5PM/1.5 ZH-5PM/5
(1) (2)
B
D2
D1
13.5
Ø14
13.5
Ø14
E2E1
13.5
Ø14
L
NP
BC
CANopen
BP
PROFIBUS DP
EH
EtherCAT
EW
POWERLINK
EI
EtherNet/IP
EP
PROFINET
L1
LINK/ACT
L2
L3
LINK/ACT
L1 L2 L3
ZH-5PM/1.5 ZH-5PM/5
ZH-8PM/5
(2)
(2)
Ø 15
~ 62
Ø 20
~ 51
~ 62
Ø 20
~ 46
Ø 20
Ø 20
~ 58
~ 58
Ø 15
~ 62
Ø 20
~ 62
Ø 20
PROFIBUS DP
ZM-5PM/BP
ZM-5PM
ZM-5PF
ZM-4PM/E
CANopen
ZM-5PF/BP
E-TRM-BC-M12/5PM
(2)
(2)
(2)
ZM-4PM/E
E-TRM-BP-M12/4PF
PROFIBUS DP
EtherCAT
POWERLINK
EtherNet/IP
PROFINET
CANopen
(2)
EtherCAT
POWERLINK
EtherNet/IP
PROFINET
(2)
(2)
ZM-12P
(1)
ZH-12P
21
22
ZM-12P ZH-12P
DIN 43651 DIN 43651
PG13.5 PG16
LiYCY 12 x 0.75 mm
2
LiYCY 10 x 0.14mm
2
LiYY 3 x 1mm
2
0.5 mm
2
1.5 mm
2
0.14 mm
2
0.5 mm
2
0.5 mm
2
1.5 mm
2
IP 67 IP 67
BC CANopen (1) BP PROFIBUS DP (1)
EH EtherCAT, EW POWERLINK,
EI EtherNet/IP, EP PROFINET (2)
ZM-5PF ZM-5PM ZM-5PF/BP ZM-5PM/BP ZM-4PM/E
M12 A – IEC 61076-2-101 M12 B – IEC 61076-2-101 M12 D – IEC 61076-2-101
CANbus (DR 303-1) PROFIBUS DP
IP67 IP 67 IP 67
(1) (2)
ZH-5PM/1.5 ZH-5PM/5 ZH-5PM-2/2
M12 A –
IEC 61076-2-101
M12 A –
IEC 61076-2-101
5 x 0.25 mm
2
3 x 0.25 mm
2
IP 67 IP 67
22.3
ZH-8PM/5 ZH-5PM/1.5 ZH-5PM/5
M12 A –
IEC 61076-2-101
M12 A –
IEC 61076-2-101
8 x 0.25 mm
2
5 x 0.25 mm
2
IP 67 IP 67
E1
E2
E2
FS610
BC
22.1
22.2
22.4
CAT-5
23
Z-MAN-RI-LEZ
Z-MAN-RI-LEZ-S
24
DLHZO DLKZOR
4 OR 108;
1 OR 2025
5 OR 2050;
1 OR 108
Z-SW
SNTEZLEZ
SF, SLTEZLEZ
23.1
-
-
-
23.2 PID
- PID
23.3
- (23.4)
23.4
-
-
23.5
-
23.6
//
(2.2)
4M5×5012.9
= 8Nm
4M6×4012.9
= 15Nm
A,B,P,TØ = 7.5 mm(max)
YØ = 3.2 mm()
A,B,P,TØ = 11.2 mm(max)
YØ = 5 mm()
25
04/21
26
ISO 4401: 2005
DLHZO-TEZ
136
66
= =
15
38
ISO 4401: 2005
DLKZOR-TEZ
= =
100
13
140
15
15
2
2
1
1
135
135
155
46
=
=
= =
65
165
3
3
15
2
2
15
3
3
3
4
13
1
2
3
DLHZO 2.3
DLKZOR 4.3
FS001
FS900
FY100
FY200
GS500
GS510
K800
P005
Y010
Z-MAN-RI-LEZ
Z-MAN-RI-LEZ-S
[mm]
4401-03-02-0-05
4401-03-03-0-05
4401-05-04-0-05
4401-05-05-0-05
