FS330
LIQZP-LEB, LIQZP-LES
16 25 32 40
l/min 250 500 800 1200
50 63 80 100 125
l/min 2000 3000 4500 7200 9350
1
X
Y
B
A
LIQZP 25 2 L4
*
L4
2
-- - -
LES NPSN
SN
LIQZP-LES-SN-BP-322L4
(1)
F
I
Q
Z
NP
BC = CANopen EW = POWERLINK
BP = PROFIBUS DP EI = EtherNet/IP
EH = EtherCAT EP = PROFINET RT/IRT
NP IL = IO-Link
LEB
LES
X1
MA
MB
SP
A X Y
B
FS330-12/C
/
*
T
2
LVDT
: 16 125 - ISO 7368
: 600 22000 l/min
: 420 bar
=
=
=
=
10
∆p=5bar(l/min)
/FI, /IQ, /IZ (
=
=
=
=
12
13
=
:
= 2
/
*
*
- = NBR
PE = FKM
BT
12
= NBR
/
8
V
*
3
3.2 E-SW-SETUP PC
3.1 Atos CONNECT
LES
E-C-SB-USB/M12
E-A-SB-USB/OPT
E-A-BTH
7
5
6
4
LEB
2
CE/ EMC
/Q /Z
24V
DC2.5A 17
-
USB
-
®
25
13
-
-
-
-
-
8
FS330
10
11
(1) (2)
0.1
± 0.1
[l/min]
(1) [l/min]
(2) [ms]
250
350
600
1.6
4
24
16
500
700
1200
2.2
5.3
25
25
800
1100
1800
7.0
14
28
32
1200
1700
2500
9.4
19
30
40
2000
2800
4000
17.7
35.5
30
50
3000
4250
6000
32.5
56
35
63
4500
6350
10000
39.5
60
40
80
7200
10200
16000
100
49.5
60
50
4
0.2
8
0.2
20
0.3
40
0.7
40
0.7
100
1
100
1
100
1
∆p = 5 bar
∆p = 10 bar
∆p A-B
[l/min]
9350
13200
22000
125
124.9
88.1
90
100
1
9
50 W
2.6 A
3 ~ 3.3
Ω
USB
IO-Link
CANopen
EN50325-4 + DS408
PROFIBUS DP
EN50170-2/IEC61158
EtherCAT
POWERLINK
EtherNet/IP
PROFINET IO RT/IRT
IEC 61158
USB 2.0
+ USB OTG
SDCI
CAN ISO11898 RS485 100 Base TX
- 50°CISO VG46
[bar]
∆p = 70 bar
P = 100 bar
[l/min]
[bar]
[cm
3
]
0~100%
[%]
A, B = 420 X = 350 Y ≤ 10
40% 350 140~160
∆T = 40°C 1%
0~100% 140bar 13.2
20
DIN EN60529
+24V
DC
V RMS = 20 ~ 32 V (10 %V PP)
±10V
DC (24 VMAX Ri50kΩ
±20mA Ri=500Ω
10V
DC @max 5mA
20mA @max 500Ω
0~5V
DC 9~24V DC 5~9V DC Ri10kΩ
0~24V
DC [ 2V] 1 V@ max 50 mA
H180°C
ISO 13732-1EN982
ED=100%
PCB
P.I.D
Atos ASCII
21
24V DC800ms1251000ms0
13
3
4
3 = LIQZP-L*-322L4
4 = LIQZP-L*-402L4
1
13.1
2
1 = LIQZP-L*-162L4
2 = LIQZP-L*-252L4
5
6
5 = LIQZP-L*-50
2L4
6 = LIQZP-L*-63
2L4
7 = LIQZP-L*-802L4
7
1250
1000
750
500
250
0
500
400
300
200
080402 00106
100
0
3000
2400
1800
1200
600
0
5000
4000
3000
2000
1000
0
9 = LIQZP-L*-1252L4
10000
8000
6000
4000
2000
0
9
8 = LIQZP-L*-1002L4
7500
6000
4500
3000
1500
0
8
12
080402 00106
080402 00106
080402 00106
080402 08040200106 00106
NBR, FKM, NBR
HL, HLP, HLPD, HVLP, HVLPD
DIN 51524
FKM
HFDU, HFDR
ISO 12922
NBR, NBR
HFC
NBR = -20~+60HFC= -20~+50
FKM/PE = -20~+80
NBR/BT= -40~+60HFC= -20~+50
20~100mm²/s-15~380mm²/s
50 °CISO VG46
∆p=5bar
[l/min]
[l/min]
[l/min]
[l/min]
[l/min]
[l/min]
0-100
0-75
0-50
0-25
13.2
100
75
50
25
0 14 4228 56 70
0 14 4228 56 70
LIQZP-16, LIQZP-25 LIQZP-32, LIQZP-40
LIQZP-50
LIQZP-63, LIQZP-80
LIQZP-100
100
75
50
25
100
75
50
25
100
75
50
25
0 10 3020 40 50
0 10 3020 40 50
0-100
0-75
0-50
0-25
0-100
0-75
0-50
0-25
0-100
0-75
0-50
0-25
0 12 3624 48 60
0 12 3624 48 60
0 16 4832 64 80
0 16 4832 64 80
1 2 3
1
1
1
1
2
3
1111 2 3
1
1
1
1
2
3
1111 2
3
1
1
1
1
2 3
1111 2 3
1
1
1
1
2 3
1111 2 3
LIQZP-125
100
75
50
25
0-100
0-75
0-50
0-25
0 28 8456 112 140
1
1
1
1
2 3
1111 2 3
0 28 8456 112 140
FS330
[%] [%]
[%] [%]
[%]
[ms] [ms]
[ms]
[ms]
[ms]
[%]
[%]
[%]
[%]
[%]
4
4
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
12
12
3
3
10 50
100
10 50
100
13.5
56
56
4
4
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
12
1
2
3
3
10 50
100
10 50
100
13.6
5
6
5
6
13.3
1
2
2
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
3
3
10 50
100
10 50
100
4
4
5
6
56
13.4
12
12
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
3
3
10 50
100
10 50
100
4
4
5
6
56
1
4
4
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
12
12
3
3
10 50
100
10 50
100
13.7
5
6
56
1
2
3
10%
90%
4
5
6
50% ± 5%
1
2
3
10%
90%
4
5
6
50% ± 5%
1
2
3
10%
90%
4
5
6
50% ± 5%
1
2
3
10%
90%
4
5
6
50% ± 5%
1
2
3
10%
90%
4
5
6
50% ± 5%
[dB]
[dB]
[dB]
[dB]
[dB]
[dB]
[dB]
[dB]
[dB]
[dB]
[Hz] [Hz]
[Hz] [Hz]
[Hz] [Hz]
[Hz]
[Hz]
[Hz] [Hz]
4
4
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
12
12
3
3
10 50
100
10 50
100
13.10 LIQZP-L*-1002L4
5
6
56
13.8 LIQZP-L*-632L4
2
2
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
3
3
10 50
100
10 50
100
4
4
5
6
56
13.9 LIQZP-L*-802L4
1
2
12
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
3
3
10 50
100
10 50
100
4
4
5
6
56
1
1
4
4
+2
0
-3
90°
45°
0°
90°
45°
0°
+2
0
-3
1
2
12
3
3
10 50
100
10 50
100
13.11 LIQZP-L*-1252L4
5
6
56
FS330
1
2
3
10%
90%
4
5
6
50% ± 5%
1
2
3
10%
90%
4
5
6
50% ± 5%
1
2
3
10%
90%
4
5
6
50% ± 5%
1
2
3
10%
90%
4
5
6
50% ± 5%
[dB]
[dB]
[dB]
[dB]
[dB]
[dB]
[dB]
[dB]
[Hz] [Hz]
[Hz] [Hz]
[Hz] [Hz]
[Hz] [Hz]
16
15
14
F
I =
Q =
Z =
/FI, /IQ, /IZ
1
2
8 (125)
17 (125)
4~20mA0~10V
DC
±10V±20mA
/I
12
1625 3250 63125
1G1/4”
1G1/2”
A
2
2G1/4”
2G3/8”
SP
MB
MA
SP
MB
MA
6
6
1
2
6
6
1
2
X1
SP
MB
MA
1
6
2
10
X1
3
3
X1
3
1
2
3
3
1G1/4”
1G3/8”
17
17.1 V+V0
17.2 VL+VL0
17.3
(Q_+)
17.4
Q_
17.5
17.6
17.7
18
FS330
/
ISO 4413
18
10000µ F/40V4700µ F/40V
: 2.5 A
10000µ F/40V4700µ F/40V
12910USB
500mA
0~10V
DC420mA
10V
DC±20mA
24V
DC
(
)
0~10V
DC
3 24V
DC/
/420mA
0V
DC, 24V DC
18.1
18.2
18.3
19
1
2
3
4
5
6
7
8
9
10
11
PE
V+
V0
V0 VL0
AGND VL0
AGND
NC
NC
NC
VL+
NC
VL0
V0 VL0
LEB /Z LES /Z
19.1 - 7/Q/F
V+
V0
AGND AGND
AGND V0
A
B
C
D
E
F
G
/Q
/F
Q_+
-
Q_ :
24V
DC
0V DC
24V
DC0V DCV0
±10V
DC/±20mA
0~10V
DC/I4~20mA
Q_ +
±10V
DC/±20mA
0~10V
DC/I4~20mA
0V
DC24V DC
19.2 -12/Z
:
Q_+
-
Q_ :
R_
24V
DC
0V DC
24V DC0V DC
±10V
DC/±20mA
0~10V
DC/I4~20mA
Q_ +
±10V
DC/±20mA
0~10V
DC/I4~20mA
24V
DC
0V DC
0V DC24V DC
L+
P24
L-
C/Q
N24
19.3
IO-Link - M12 - 5 LEB-SN-IL
24V
DC
24V DC
0V
DC
0V
DC
1
TX+
2
RX+
3
TX-
4
RX-
1
CAN_SHLD
2
3
CAN_GND
4
CAN_H
5
CAN_L
1
+5V_USB
2
ID
3
GND_USB
4
D-
5
D+
1
+5V
2
LINE-A
3
DGND
4
LINE-B
5
(1) (2)
19.4 -
USB-M12-5
BP-M12-5
0
-
+
0
BC-M12-5
-
0
EH,EW,EI,EP-M12-4
2CAN+5V
(2)
B B B A
(1)
(1)
(1)
(1)
Valve Valve
Class
Master Master
BClass ClassClass
(1)
(2)
FS330
19.6 LEB-SN-IL
(1)
19.5 LEB-SN-NP
A2
A4
A3A1
A2
A4
A1
A3
Ø 28Ø 29
~ 93
~ 100
PG13.5
PG16
Ø 28Ø 29
~ 60
~ 76PG11
PG11
ZM-12P
(1)
ZH-12P
ZM-7P
(1)
ZH-7P
(2)
(2)
, /Q, /F
/Z
(1) (2)
35.5
~ 23
35.5
~ 23
Ø
Ø
Ø
(1)
IO-Link
ZM-5PF
(2)
E-C-SB-USB/M12
E-A-BTH
Ø
Ø
E-C-SB-USB/M12
(2)
E-A-BTH
19.8
NP
BC
CANopen
BP
PROFIBUS DP
EH
EtherCAT
EW
POWERLINK
EI
EtherNet/IP
EP
PROFINET
L1
LINK/ACT
L2
L3
LINK/ACT
LEDS
L1 L2 L3
19.7 LES
A2
A4
A3A1
A2
A4
A1
A3
Ø 28Ø 29
~ 93
~ 100
PG13.5
PG16
Ø 28Ø 29
~ 60
~ 76PG11
PG11
Ø 15
~ 62
Ø 20
~ 51
~ 62
Ø 20
~ 46
Ø 20
Ø 20
~ 58
~ 58
Ø 15
~ 62
Ø 20
~ 62
Ø 20
Ø
Ø
PROFIBUS DP
ZM-5PM/BP
ZM-5PM
ZM-5PF
ZM-4PM/E
CANopen
ZM-5PF/BP
E-TRM-BC-M12/5PM
(2)
(2)
(2)
ZM-4PM/E
E-TRM-BP-M12/4PF
E-C-SB-USB/M12
(2)
PROFIBUS DP
EtherCAT
POWERLINK
EtherNet/IP
PROFINET
CANopen
(2)
EtherCAT
POWERLINK
EtherNet/IP
PROFINET
(2)
(2)
, /Q, Z/F/
(2)
(2)
(1) (2)
ZM-12P
(1)
ZH-12P
ZM-7P
(1)
ZH-7P
SN NP BC , BP EH , EW , EI , EP
E-A-BTH
USB
FS330
21
ZM-7P ZH-7P
PG11 PG11
LiYCY 7 x 0.75 mm
2
LiYCY 7 x 1 mm
2
LiYCY 7 x 0.75 mm
2
LiYCY 7 x 1 mm
2
IP 67 IP 67
ZM-12P ZH-12P
DIN 43651 DIN 43651
PG13.5 PG16
LiYCY 12 x 0.75 mm
2
LiYCY 10 x 0.14mm
2
LiYY 3 x 1mm
2
0,5 mm
2
1.5 mm
2
0.14 mm
2
0,5 mm
2
0.5 mm
2
1.5 mm
2
IP 67 IP 67
BC CANopen (1) BP PROFIBUS DP (1)
EH EtherCAT, EW POWERLINK,
EI EtherNet/IP, EP PROFINET (2)
ZM-5PF ZM-5PM ZM-5PF/BP ZM-5PM/BP ZM-4PM/E
M12 A – IEC 61076-2-101 M12 B – IEC 61076-2-101 M12 D – IEC 61076-2-101
CANbus (DR 303-1) PROFIBUS DP
IP67 IP 67 IP 67
(1) (2)
20
IL IO-Link
ZM-5PF
M12 A – IEC 61076-2-101
5 x 0.75 mm
2
max 20 m
IP 67
BC
21.1 - 7
21.2 - 12
21.3 -
21.4
² ²
CAT-5
23
(1)
(1)
(2)
A
B
C
D
A =
B =
C =
LIQZP
16
5.6
25
8.2
32
10.9
40
16.7
50
23.9
63
44.0
80
71.6
100
122.5
125
375
22
4M8×9012.9
= 35Nm
4M12×10012.9
= 125Nm
4M16×6012.9
= 300Nm
4M20×7012.9
= 600Nm
4M20×8012.9
= 600Nm
4M30×12012.9
= 2100Nm
8M24×8012.9
= 1000Nm
8M30×12012.9
= 2100Nm
8M36×26012.9
= 3600Nm
1 2
71215mm
A15mm
16 25 32 40 50 63 80 100 125
B
ZM-7P 32 32 32 40 45 68 68 80 142
ZH-7P
(1) (1) (1) (1)
29 52 52 64 125
ZM-12P
(1) (1) (1) (1) (1)
35 35 47 108
ZH-12P
(1) (1) (1) (1) (1) (1) (2)
40 101
C (max)
- 104 114 121 134 141 172 202 229 271
D
- 124 134 141 154 161 192 222 249 291
D
- 139 149 156 169 176 207 237 264 306
100x1005
30
LIQZP-LEB-*-162
LIQZP-LES-*-162
65x65
5
75
203
24
H
LIQZP-LEB-*-322
LIQZP-LES-*-322
LIQZP-LEB-*-402
LIQZP-LES-*-402
FS330
~90
C 20
A1
85x85
5
80
265
H
218
B
~90
125
C 20
A1
B
~90
125
C 20
A1
B
~98
125
C 20
125x125 1A5
39
253
(3)
LIQZP A1
B (1) C (2)
H
LEB - SN - IL 140 60 - 242
LEB - SN - NP 140 60 - 242
LES - SN - NP, BC, BP, EH 140 60 58 235
LES - SN - EW, EI, EP 155 60 58 235
+15 -
235
H
(3)
(3)
(3)
265
125
B
265
LIQZP-LEB-*-252
LIQZP-LES-*-252
273
(1)
(2)
(3)
23
P006
[mm]
LIQZP-LEB-*-502
LIQZP-LES-*-502
140x140
49
129
295
5
A1
76
142
314
LIQZP-LEB-*-632
LIQZP-LES-*-632
LIQZP-LEB-*-802
LIQZP-LES-*-802
LIQZP-LEB-*-1002
LIQZP-LES-*-1002
45
162
334
70
178
365
Ø300
B
~105
125
C
20
180x180 2A5
B
~128
125
C
20
Ø250
A2
B
~128
125
C
20
B
~140
125
C
20
A2
~280
~303
~303
~303
LIQZP A1 A2
B (1) C (2)
LEB - SN - IL 140 150 60 -
LEB - SN - NP 140 150 60 -
LES - SN - NP, BC, BP, EH 140 150 60 58
LES - SN - EW, EI, EP 155 165 60 58
+15 +15 -
(3)
(3)
(3)
(3)
(1)
(2)
(3)
P006
23
01/25
26
LIQZP-LEB-*-1252
LIQZP-LES-*-1252
200
318
503
Ø380
FS001
FS900
GS500
GS510
GS520
K800
P006
QB340
QF340
E-MAN-RI-LEB
E-MAN-RI-LES
A2
B
~200
125
C
20
LIQZP A2
B (1) C (2)
LEB - SN - IL 140 60 -
LEB - SN - NP 140 60 -
LES - SN - NP, BC, BP, EH 140 60 58
LES - SN - EW, EI, EP 155 60 58
+15 -
385
(3)
(1)
(2)
(3)
P006
23
